REBEKA™ - retractable BSE detector for SEM
Key properties
RELIABLE SENSOR | PRECISE MECHANICS |
---|---|
|
|
Technical parameters
-
SENSOR UNIT
single crystal scintillator with optimized efficiency and minimized afterglow, exponential decay time 45 ns with 30 photons/keV Outer diameter 15 mm Inner hole diameter 3 / 2 / 1.5 or 1 mm. This dimension limits the field of view Exclusive CRYTUR LOW-ENERGY COATING™ sensitive down to 0.2 keV Sensitivity down to 1pA beam current Thin - allows a working distance down to 2 mm |
-
MECHANICAL UNIT
|
Dimensions 406 x 100 x 72 mm Bellows design for ultimate vacuum 150 mm motorized retraction +/- 2 mm fine adjustment in x, y, z axis 0.02 mm repeatability Flange adapted to customer's SEM Silver / black / blue / red matt surface finish available |
-
ELECTRONICS CONTROL UNIT
Dimensions 270 x 180 x 65 mm Supply 230/110 V 3 noise filters optimized for different scanning speeds 50 MHz bandwidth Internal source 0-1200 V for PMT HV Output video signal -1/+1V (-5/+5V) Full remote software control DC offset up to -20V |
Sample images
|
|
Evolution of BSE contrast with increasing landing energy Sample: Chondrules and metal flakes in Ghubara Meteorite, provided by Institute of Geology CAS |
|
Rebeka can operate in a fast scanning speed down to 20 ns / pxl. Sample: Er / Yb fiber laser - detail, provided by Institute of Photonics and Electronics |
|
Sample: Lu3Al5O12 with Lu2O3 crystals |
|
|
|
Sample: Ir crystals on ceramic surface |
Sample: Sn bond on electronic chip |
Sample: Natural garnet crystal |
Sample: Hg - Pd - Te provided by Czech geological survey |